1.Maximum Coating Wafer:6"
2.Working Power:AC110V~220V,50Hz
3.Vacuum Chuck: 3 pieces
4.Made by Henan Chengyi
EZ6 vacuum spin coater is an economic desktop Vacuum Spin Coater with vacuum chunk which is designed for quality coating of sol-gel at the lowest cost. By using adhesive tape to stick and hold samples on the rotating plate, the instrument provides the advantages of cost effectiveness and ease of maintenance. Complete accessories such as vacuum chuck, oilless vacuum pump, electrical wire is included for immediately use.
| EZ6-S Vacuum Spin Coater with Oilless Vacuum Pump | |
| Max.Wafer Diameter | 6” |
| Speed adjustable range | 100~12000rpm,adjustable |
| Acceleration range | 100~30000rpm/s |
| Speed resolution | 1rpm |
| Max single step time | 3000s |
| Time resolution | 0.1s |
| Programmable control | 10 programmable,10 steps |
| Motor | BLDC Brushless Direct Current Motor |
| Vacuum plate | O. D 10mm, 25mm 50mm,Total 3 pieces alumina vacuum plate |
| Working voltage | AC220V, 50Hz |
| Dimension | 295*366*270mm |
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