CHY-EZ6 Laboratory Vacuum Spin Coating Machine for Max 150mm Wafer Coating

1.Maximum Coating Wafer:6"

2.Working Power:AC110V~220V,50Hz

3.Vacuum Chuck: 3 pieces

4.Made by Henan Chengyi

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Application

EZ6 vacuum spin coater is an economic desktop Vacuum Spin Coater with vacuum chunk which is designed for quality coating of sol-gel at the lowest cost. By using adhesive tape to stick and hold samples on the rotating plate, the instrument provides the advantages of cost effectiveness and ease of maintenance. Complete accessories such as vacuum chuck, oilless vacuum pump, electrical wire is included for immediately use.

Product parameters

SPECIFICATIONS FOR EZ6 VACUUM SPIN COATER
Spin Coater	Chamber size	1.Chamber diameter: 170mm diameter,HDPE chamber material 2.Maximum wafer sample: 1cm~150mm(6" wafer)
	Vacuum Chuck	3 Pieces standard vacuum chuck for use
	Rotating Motor	100w Brushless Motor
	Spin Speed	Speed range:100~12000rpm/s adjustable Acceleration adjustable range:100~3000rpm/s Maxi coating time of single step: 3000s Time Resolution 0.1s 10 set programmable with 10 steps of each program can restore
Power/Dimension	Voltage	Wide range AC100~230V, adjustable
	Diamension	358256258mm
	Gross weight	20kg
Optional parts		1.You may choose Precision Electronic Single Channel Pipette: 20 - 200uL for more accurate coating 2.Using plasma cleaner to treat substrate surface before coating can improve film quality