CHY-EZ4 Laboratory Vacuum Spin Coater with Oilless Vacuum Pump

1.Maximum Coating Wafer:4"

2.Working Power:AC110V~220V,50Hz

3.Vacuum Chuck: 3 pieces

4.Made by Henan Chengyi

Inquire Now None

Application

EZ4 is an economic desktop Vacuum Spin Coater without vacuum chunk which is designed for quality coating of sol-gel at the lowest cost. By using adhesive tape to stick and hold samples on the rotating plate, the instrument provides the advantages of cost effectiveness and ease of maintenance. Complete accessories such as vacuum chuck, oilless vacuum pump, electrical wire is included for immediately use.

Product parameters

SPECIFICATIONS FOR VACUUM SPIN COATER
Spin Coater	Chamber size	1.Chamber diameter: 134mm diameter 2.Maximum wafer sample: 4" diameter at Max.
	Vacuum Chuck	3 Pieces standard vacuum chuck for use
	Spin Speed	1.Digital display with variable speed up 100 to 9999 RPM 2.Programmable segments of different spin times,5 programmable with 5 steps of each program. 3.Speed resolution:1rpm
Power/Dimension	Voltage	Wide range AC100~230V, adjustable
	Diamension	250210200mm
	Gross weight	16kg
Optional parts		1.You may choose Precision Electronic Single Channel Pipette: 20 - 200uL for more accurate coating 2.Using plasma cleaner to treat substrate surface before coating can improve film quality