1.Maximum Coating Wafer:12"
2.PTFE inner chamber material
3.PLC programmable control with 7" touch panel
4.Auto dispenser system for option
The AC300-SE Spin coater is driven by advanced servo motors, with high precision and repeatability, and is equipped with an industrial grade PLC 7-inch full-color touch screen operation control. Suitable for processing maximum 12 inch circular substrates,special shape sample can be customized chuck. Stainless steel inner cavity with PTFE coated shell, solvent resistant PC transparent cover, easy to clean, corrosion-resistant.
| AC300-SE Vacuum Spin Coater | |
| Max.Wafer Diameter | 12" |
| Speed adjustable range | 5000rpm,adjustable |
| Acceleration range | 10000rpm/s |
| Speed resolution | 1rpm |
| Max single step time | 3000s |
| Time resolution | 0.1s |
| Programmable control | Programmable control,100program 100 steps max |
| Coating uniformity | 4inch :± 0.65%; 6inch: ±0.76%; 8inch±0.62%;12inch:±1.16% |
| Vacuum chuck | 4", 6" &8" chuck for option, special shape can customized |
| Working voltage | AC220V, 50Hz |
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