1.Maximum Coating Wafer:8"
2.Working Power:AC110V~220V,50Hz
3.Vacuum Chuck: 3 pieces
Power Supply | AC220/110V 50/60Hz |
Rated Power | 200W |
Coating speed | 500-6000rpm |
Spin Speed & Time | Digital control panel with TWO programmable segments for different spin times and speeds |
Spinning Time | 1 - 600s |
Vacuum pump speed | >60L/min |
Vacuum chuck size | 150mm |
Dimension | 350*500*400mm |
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