1.Fast Annealing,Post-ion implantation annealing
2.RTO,RTN
3.Silicidation
4.Diffusion
5.Electrode alloying
6.Crystallization and densification
| Product Name | Mini RTP Tube Furnace |
| Model | Mini-RTP |
| Furnace Type | Fast Heating/Cooling Sintering |
| Display Model | LED Digital Light |
| Maximum Temperature | 1100℃ |
| Working Temperature | ≤1000℃ |
| Heating rate | ≤20℃/Second |
| Heating zones | Single heating zone |
| Quartz Tube Diameter | O.D50*600mm |
| Inner Diameter | I.D 42*600mm |
| Heating Zone Length | 100mm |
| Max Sample | 35*25mm
|
| Control mode | Intelligent PID auto control |
| Temperature Accuracy | ±1℃ |
| Temperature curve | 30 segments programmable |
| Over heat alarm | Have |
| Overcurrent protection | Have |
| Thermocouple Failure Protection | Have |
| Temperature Sensor | K-type thermocouple |
| Heating Element | 3pieces Infrared tube |
| Quartz Tube Material | High Purity Quartz |
| After-sales service | 12 month warranty, durable maintaince and repair support |
| Power Supply | 220V 50HZ |
| Rated power | 1.5kw |
| Overall dimensions | 610×400×410 (mm ) |
| Packing | 3-ply wooden case |
| Accessories | Protective Glove,Crucible Tong,Crucible,Quartz Tube,Vacuum Flange,User Manual. |
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