CHY-250TC Laboratory Desktop Drawer UV Ozone Cleaner for Max 400mm Wafer Cleaning

UV Ozone Cleaner

· Indoor Use Only; Altitude Use Up To 5,500 Feet;

· Temperature Range 41-104 Degrees Fahrenheit;

· Maximum Relative Humidity 80%, Up To 87 Degrees Fahrenheit Decreasing Linearly 

  to 50% Relative Humidity At 104 Degrees Fahrenheit;

· Main Power Supply Fluctuations Not To Exceed 10% Of The Nominal Voltage; Over voltage Category II;

· Pollution Degree 2; ozone level (ambient) measurement at <45 ppb.

· Solid metal double wave mercury lamp

 · Wave Length: 253.7nm and 184.9nm 

· UV lamp service life:  5000 hrs

· UV light area: 200 x 200 mm 

· Can clean crystal wafer with diameter up to 12“

· Stainless steel case

· Sliding drawer for easy sample loading

· Sample stage area is 310 mm x 320 mm ( ~12"x12" )

· Ozone venting device is built in the chamber

· Timer ranges from 0.01 seconds to 99.9 hours.

·Sample stage is heatable up to 150ºC with precision temperature controlle

· Temperature controller is 20 segments programmable with +/-2 C accuracy

· Temperature uniformity:<10C within 6 inches diameter area; <20C within 12 inches diameter

· Heating rate: 15C max. 

· The distance between sample stage and lamp is adjustable from 20mm  to 40mm.

3 in. diameter vent port is built in the back of the machine· One 10 ft. flexible pipe and one vent

clamp are included for connecting the cleaner exhaust to a lab venting system.