CHY-P5LS Laboratory 5L 20.0MHz Plasma Cleaning Machine

1.Chamber dimension:O.D 150*270mm

2.Chamber material of plasma cleaning machine:Stainless steel or High Purity Quartz

3.RF power:20.0MHz

4.Automatic Matching

5.Made by Henan Chengyi

CHY-P5LS Laboratory 5L 20.0MHz Plasma Cleaning Machine with o.d150*270mm quartz chamber.It is widely used for laboratory wafer plasma cleaning,plasma etching etc

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Application

Chengyi Vacuum Plasma Cleaner divided into two types, atmospheric and vacuum; it is widely used in semi-conductor, PCB, medical diagnosis, elastomer industry, optical industry,etc.

Our plasma cleaning machine has two type: 40KHz,20MHz and13.56Mhz, and 2.45GHz RF Power for optional. Our standard chamber capacity has 2L, 5L,10L which used in laboratory. Basing on different industry, we can do customized chamber dimension with requested RF power.

Product parameters

Model No.	CHY-P5LS
Product Name	Plasma Cleaner
Display	LCD touch controller
Working voltage	AC 220V, 50Hz
RF Frequency	20.0MHz
RF power	0~200 w,adjustable
RF offset	< 0.2KHz
Characteristic impedance	50Ω, automatic matching
Vacuum degree	10-30Pa, equipped with a mechanical pump
Gas speed	Two way Float Flow Gas Control10-100ml/min, adjustable
Control	PLC Auto Control or Mannually adjustable
Inner chamber size	Chamber Dimension Φ 150*270mm Capacity: 5L
Pressure Gauge	A simple digital pressure gauge is equipped for reading
Clearing time	1~99999mins adjustable
Cooling way	Forced cooling
Outer dimension	600500480mm
Gross weight	45 kg