CHY-P5S 40KHz 5L Vacuum Plasma Cleaner with O.D150*270mm Quartz Chamber

1.Vacuum plasma cleaner chamber dimension:O.D 150*270mm

2.Chamber material:Stainless steel or High Purity Quartz

3.RF power:40KHz

4.Automatic Matching

5.Made by Henan Chengyi

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Application

Chengyi Vacuum Plasma Cleaner divided into two types, atmospheric and vacuum; it is widely used in semi-conductor, PCB, medical diagnosis, elastomer industry, optical industry,etc.

Our plasma cleaner have two type: 40KHz,20MHz and13.56Mhz, and 2.45GHz RF Power for optional. Our standard chamber capacity has 2L, 5L,10L which used in laboratory. Basing on different industry, we can do customized chamber dimension with requested RF power.

Product parameters

Model No.	CHY-P5S
Product Name	Vacuum Plasma Cleaner
Display	LCD touch controller
Working voltage	AC 220V, 50Hz
RF Frequency	40KHz,13.56MHz for optional
RF power	0~300 w,adjustable
RF offset	< 0.2KHz
Characteristic impedance	50Ω, automatic matching
Vacuum degree	10-1000Pa, equipped with a mechanical pump
Gas speed	Two way Float Flow Gas Control60-600ml/min, adjustable
Control	MCU Auto Control or Mannually adjustable
Inner chamber size	Chamber Dimension Φ 150*270mm Capacity: 5L
Pressure Gauge	A simple digital pressure gauge is equipped for reading
Clearing time	1~100mins adjustable
Cooling way	Forced cooling
Outer dimension	600500480mm
Gross weight	45 kg