1.Vacuum plasma cleaner chamber dimension:220*260*200mm
2.Chamber material:Stainless steel
3.RF power:13.56MHz
4.Automatic Matching
5.Made by Henan Chengyi
Chengyi Vacuum Plasma Cleaner divided into two types, atmospheric and vacuum; it is widely used in semi-conductor, PCB, medical diagnosis, elastomer industry, optical industry,etc.
Our plasma cleaner have two type: 40KHz,20MHz and13.56Mhz, and 2.45GHz RF Power for optional. Our standard chamber capacity has 2L, 5L,10L which used in laboratory. Basing on different industry, we can do customized chamber dimension with requested RF power.
| Model No. | CHY-P10LS |
| Product Name | Vacuum Plasma Cleaner |
| Display | LCD touch controller |
| Working voltage | AC 220V, 50Hz |
| RF Frequency | 13.56MHz |
| RF power | 0~300 w,adjustable |
| RF offset | < 0.2KHz |
| Characteristic impedance | 50Ω, automatic matching |
| Vacuum degree | 1-30Pa, equipped with a mechanical pump |
| Gas speed | Two way Float Flow Gas Control60-160ml/min, adjustable |
| Control | MCU Auto Control or Mannually adjustable |
| Inner chamber size | Chamber Dimension 220*260*200mm Capacity: 10L |
| Pressure Gauge | A simple digital pressure gauge is equipped for reading |
| Clearing time | 1~99999 adjustable |
| Cooling way | Forced cooling |
| Vacuum Pump | 4L rotary vacuum pump |
| Gross weight | 95 kg |
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